YBa2Cu3O7-δ long Josephson junctions on bicrystal Zr1-xYxO2 substrates fabricated by preliminary topology masks

被引:17
作者
Masterov, D. V. [1 ]
Parafin, A. E. [1 ,3 ]
Revin, L. S. [1 ,2 ,3 ]
Chiginev, A. V. [1 ,2 ]
Skorokhodov, E. V. [1 ]
Yunin, P. A. [1 ,3 ]
Pankratov, A. L. [1 ,2 ,3 ]
机构
[1] RAS, Inst Phys Microstruct, GSP-105, Nizhnii Novgorod 603950, Russia
[2] Nizhnii Novgorod State Tech Univ, Ctr Cryogen Nanoelect, Nizhnii Novgorod, Russia
[3] Lobachevsky State Univ Nizhny Novgorod, Nizhnii Novgorod, Russia
基金
俄罗斯科学基金会;
关键词
YBCO; magnetron sputtering; Josephson junction; YSZ; GRAIN-BOUNDARY JUNCTIONS; HIGH-TEMPERATURE SUPERCONDUCTOR; CURRENT-PHASE RELATION; FILMS; YBCO; MICROSTRUCTURE; GROWTH; NOISE; STEPS; THIN;
D O I
10.1088/1361-6668/30/2/025007
中图分类号
O59 [应用物理学];
学科分类号
摘要
YBa2Cu3O7-delta (YBCO) films were fabricated by magnetron sputtering with modification of the substrate surface by preliminary topology masks. Formation features of Josephson junctions on bicrystal Zr1-xYxO2 (YSZ) substrates have been considered. The structural and electrical properties of such junctions were investigated. As a result, the presented technology allows us to fabricate YBCO structures on YSZ substrates with a buffer cerium dioxide (CeO2) layer where YBCO film sputtering is the final stage of structure formation. In particular, long Josephson junctions with good characteristics have been fabricated by this technology and measured, allowing us to achieve critical currents of 80 mA for 150 um junctions.
引用
收藏
页码:1 / 5
页数:5
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