Grain growth: The key to understand solid-state dewetting of silver thin films

被引：52

作者：

Jacquet, P. ^{[1
,2
,3
]}

Podor, R. ^{[4
]}

Ravaux, J. ^{[4
]}

Teisseire, J. ^{[1
]}

Gozhyk, I. ^{[1
]}

Jupille, J. ^{[2
,3
]}

Lazzari, R. ^{[2
,3
]}

机构：

[1] CNRS St Gobain Rech, UMR 125, Surface Verre & Interfaces, 39 Quai Lucien Lefranc, F-93303 Aubervilliers, France

[2] CNRS, Inst NanoSci Paris, UMR 7588, 4 Pl Jussieu, F-75252 Paris, France

[3] UPMC Univ Paris 06, Univ Sorbonne, UMR 7588, Inst NanoSci Paris, 4 Pl Jussieu, F-75252 Paris, France

[4] CEA CNRS UM ENSCM, UMR 5257, Site Marcoule, Inst Chim Separat Marcoule, F-30207 Bagnols Sur Ceze, France

来源：

SCRIPTA MATERIALIA | 2016年 / 115卷

关键词：

Solid-state dewetting; Grain growth; Surface diffusion; Scanning electron microscopy; Thin films; ELECTRON-MICROSCOPY; HILLOCK FORMATION; AU FILMS; DIFFUSION;

D O I：

10.1016/j.scriptamat.2016.01.005

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The dynamics of solid-state dewetting of polycrystalline silver thin films in oxygen atmosphere was investigated with in situ and real-time environmental Scanning Electron Microscopy at high temperature combined with Atomic Force Microscopy. Three steps were identified during dewetting: induction, hole propagation without specific rim and sintering. Moreover, it was observed that a very selective grain growth, promoted by surface diffusion, plays a key role all along the process. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：128 / 132

页数：5

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