Performance of silicon micromachined waveguide at W-band

被引：15

作者：

Becker, JP ^{[1
]}

East, JR

Katehi, LPB

机构：

[1] Montana State Univ, Dept Elect & Comp Engn, Bozeman, MT 59717 USA

[2] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

来源：

ELECTRONICS LETTERS | 2002年 / 38卷 / 13期

关键词：

D O I：

10.1049/el:20020457

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fabrication and measurement of low-loss micromachined waveguides developed in (001) silicon through wet anistropic etching is detained. Such waveguides are candidates for use in submillimetre-wave systems owing to their compatibility with both efficient micromachined horn antenna elements and planar-based circuitry.

引用

页码：638 / 639

页数：2

共 4 条

[1] A finite ground coplanar line-to-silicon micromachined waveguide transition [J].

Becker, JP ;

Lee, Y ;

East, JR ;

Katehi, LPB .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2001, 49 (10) :1671-1676

[2] A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology [J].

Collins, CE ;

Miles, RE ;

Digby, JW ;

Parkhurst, GM ;

Pollard, RD ;

Chamberlain, JM ;

Steenson, DP ;

Cronin, NJ ;

Davies, SR ;

Bowen, JW .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1999, 9 (02) :63-65

[3] Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies [J].

McGrath, William R. ;

Walker, Christopher ;

Yap, Markus ;

Tai, Yu-Chong .

IEEE Microwave and Guided Wave Letters, 1993, 3 (03) :61-63

[4] Etched-silicon micromachined W-band waveguides and horn antennas [J].

Shenouda, BA ;

Pearson, LW ;

Harriss, JE .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2001, 49 (04) :724-727

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