A review on diamond-like carbon films grown by pulsed laser deposition

被引：56

作者：

Lu, Yimin ^{[1
]}

Huang, Guojun ^{[1
]}

Wang, Sai ^{[1
]}

Mi, Chaowei ^{[1
]}

Wei, Shangfang ^{[1
]}

Tian, Fangtao ^{[1
]}

Li, Wei ^{[1
]}

Cao, Haiyuan ^{[1
]}

Cheng, Yong ^{[1
]}

机构：

[1] Army Engn Univ, Ordnance Noncommissioned Officer Acad, Wuhan 430075, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2021年 / 541卷

关键词：

Pulsed laser deposition; Diamond-like carbon film; Tribological property; Protective and anti-reflective property; Mechanical performance; Antibacterial activity and biocompatibility; DLC THIN-FILMS; TRIBOLOGICAL PROPERTIES; OPTICAL-PROPERTIES; MECHANICAL-PROPERTIES; NANOCOMPOSITE FILMS; SURFACE-PROPERTIES; DRY FRICTION; COATINGS; PLD; SUBSTRATE;

D O I：

10.1016/j.apsusc.2020.148573

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Pulsed laser deposition is an excellent technology for growing diamond-like carbon films. It can provide sufficient ion energy at a low temperature to achieve the desired compound or doped coating during the deposition process. This review discusses the influence of the dominant laser parameters, ambient gas, and substrate-target conditions on the various properties of diamond-like carbon films by arranging the data reported in the last decade. Details of the basic and advanced pulsed laser deposition processes used to grow diamond-like carbon coatings are reviewed, and the highly adhesive diamond-like carbon film deposited by advanced pulsed laser deposition is emphasized. The excellent protective performance of diamond-like carbon films prepared by pulsed laser deposition is attributed to their high hardness, chemical inertness, low friction, and superior wear resistance, leading to applications in the fields of tribology, mechanics, medicine, and optics. Double laser beam deposition, hybrid pulsed laser deposition, and ion management in a magnetic field, which represent the development of pulsed laser deposition, are also discussed. This review is expected to offer assistance and inspiration to researchers engaged in the growth of diamond-like carbon films.

引用

页数：12

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