Precipitation kinetics of LiNbO3 and LiNb3O8 crystalline phases in thermally annealed amorphous LiNbO3 thin films

被引：9

作者：

Akazawa, H. ^{[1
]}

Shimada, M. ^{[1
]}

机构：

[1] NTT Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2006年 / 203卷 / 11期

关键词：

D O I：

10.1002/pssa.200669502

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The pyrochlore (LiNb3O8) phase in lithium niobate crystal does not contribute to ferroelectric or electrooptic properties. We investigated a way to suppress the precipitation of this phase that was formed by thermally annealing amorphous LiNbO3 films. The volume fraction of LiNb3O8 with respect to LiNbO3 becomes higher during longer annealing periods and at higher annealing temperatures because of the evaporation of Li2O units from the surface. Annealing in an O-2 atmosphere promotes the formation of the pyrochlore phase more than in a vacuum. We propose rapid thermal annealing of oxygen-rich LiNbO3 film in a vacuum to provide the best solution to obtaining transparent, single LiNbO3 phase film. (c) 2006 WILFY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：2823 / 2827

页数：5

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