A High Stability Optical Shadow Sensor With Applications for Precision Accelerometers

被引:15
作者
Bramsiepe, Steven G. [1 ]
Loomes, David [2 ]
Middlemiss, Richard P. [1 ]
Paul, Douglas J. [3 ]
Hammond, Giles D. [1 ]
机构
[1] Univ Glasgow, SUPA Sch Phys & Astron, Glasgow G12 8UU, Lanark, Scotland
[2] DaLEK Software Ltd, Glasgow G61 1EJ, Lanark, Scotland
[3] Univ Glasgow, Sch Engn, Glasgow G12 8LT, Lanark, Scotland
基金
英国工程与自然科学研究理事会;
关键词
Shadow sensor; displacement sensor; low noise; gravimeter; gravimetry; low noise electronics; lock-in amplifier; digital lock-in amplifier; digital filters; LOCK-IN AMPLIFIER; PHASE-SENSITIVE DETECTION; ATOMIC-FORCE MICROSCOPY; DISPLACEMENT SENSOR; LOW-COST; MEMS;
D O I
10.1109/JSEN.2018.2818066
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Displacement sensors are found in a variety of applications including gravitational wave detectors, precision metrology, tissue imaging, gravimeters, microscopy, and environmental monitoring. Most of these applications benefit from the use of displacement sensors that offer both high precision and stability. This is particularly the case for gravimetry where measurements are often taken over multi-day timescales. In this paper we describe a custom-built microcontroller-based displacement sensor that has been utilized in a micro-electromechanicalsystem gravimeter. The system runs off battery power and is low-cost, portable, and lightweight. Using an optical shadow sensor technique, and by designing a digital lock-in amplier based around a dsPIC33 microcontroller, we demonstrate a displacement sensitivity of 10 nm/Hz down to 300 s, and an rms sensitivity of 1 nm over timescales of one day. The system also provides real time monitoring/control of temperature, using an AD7195 ratiometric bridge to provide mK control of three separate PT100 sensors. Furthermore, a tilt sensor conditioning circuit is incorporated to drive a pair of electrolytic tilt sensors, resulting in the ability to monitor 2 axis tilt at the level of 1 microradian over approximately 1 day. The sensor system described is thus multifunctional and capable of being incorporated into precision accelerometers/gravimeters, or indeed other applications where long term displacement/temperature monitoring is necessary.
引用
收藏
页码:4108 / 4116
页数:9
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