Infrared optical properties of sol-gel Pb1-xLaxTiO3 ferroelectric thin films

被引:5
作者
Shi, FW [1 ]
Hu, ZG [1 ]
Wang, GS [1 ]
Lin, T [1 ]
Ma, JH [1 ]
Huang, ZM [1 ]
Meng, XJ [1 ]
Sun, JL [1 ]
Chu, JH [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
基金
中国国家自然科学基金;
关键词
ferroelectric thin films; sol-gel; spectroscopic ellipsometry; optical properties;
D O I
10.1016/j.tsf.2003.09.059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The Pb1-xLaxTiO3 (PLT) ferroelectric thin films on Pt/Ti/SiO2/Si(1 0 0) substrates were fabricated by a sol-gel process. The infrared optical properties of PLT thin films with x = 0.1, 0.2, 0.25 on platinized silicon Pt(1 1 1)/Ti/SiO2/Si(1 0 0) substrates were studied by infrared spectroscopic ellipsometry (IRSE) technique in the wavelength region from 2.5 to 12.6 mum. The infrared optical constants were obtained by fitting the IRSE data using a classical dielectric function model. The refractive index increases, and the extinction coefficient decreases as wavenumber increases in the measured infrared region. The refractive index of PLT thin films decreases as the La contents increase in the films. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:223 / 226
页数:4
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