All Inkjet-Printed Metal-Oxide Thin-Film Transistor Array with Good Stability and Uniformity Using Surface-Energy Patterns

被引:101
作者
Li, Yuzhi [1 ]
Lan, Linfeng [1 ]
Sun, Sheng [1 ]
Lin, Zhenguo [1 ]
Gao, Peixiong [1 ]
Song, Wei [1 ]
Song, Erlong [1 ]
Zhang, Peng [1 ]
Peng, Junbiao [1 ]
机构
[1] South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
inkjet printing; metal oxide; thin-film transistors; surface-energy patterns; Cytop; LOW-TEMPERATURE; HIGH-RESOLUTION; GATE INSULATOR; MOBILITY; PROFILE; ROUTE;
D O I
10.1021/acsami.7b00435
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
An array of inkjet-printed metal-oxide thin-film transistors (TFTs) is demonstrated for the first time with the assistance of surface-energy patterns prepared by printing pure solvent to etch the ultrathin hydrophobic layer. The surface energy patterns not only restrained the spreading of inks but also provided a facile way to regulate the morphology of metal oxide films without optimizing ink formulation. The fully printed InGaO TFT devices in the array exhibited excellent electron transport characteristics with a maximum mobility of 11.7 cm(2) V-1 s(-1), negligible hysteresis, good uniformity, and good stability under bias stress. The new route lights a general way toward fully inkjet-printed metal-oxide TFT arrays.
引用
收藏
页码:8194 / 8200
页数:7
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