Structural, Optical, and Electrical Properties of ZnO Thin Films Deposited by Sol-Gel Dip-Coating Process at Low Temperature

被引:17
作者
Kim, Soaram [1 ]
Nam, Giwoong [1 ]
Yoon, Hyunsik [1 ]
Park, Hyunggil [1 ]
Choi, Hyonkwang [1 ]
Kim, Jong Su [2 ]
Kim, Jin Soo [3 ]
Kim, Do Yeob [4 ]
Kim, Sung-O [4 ]
Leem, Jae-Young [1 ]
机构
[1] Inje Univ, Dept Nano Syst Engn, Ctr Nano Mfg, Gimhae 621749, Gyungnam, South Korea
[2] Yeungnam Univ, Dept Phys, Gyongsan 712749, Gyeongbuk, South Korea
[3] Chonbuk Natl Univ, Div Adv Mat Engn, RCAMD, Jeonju 561756, Chonbuk, South Korea
[4] Clemson Univ, Holcombe Dept Elect & Comp Engn, COMSET, Clemson, SC 29634 USA
基金
新加坡国家研究基金会;
关键词
zinc oxide; sol-gel method; thin films; structural properties; optical properties; electrical properties; VAPOR-DEPOSITION; SPRAY-PYROLYSIS; BAND-GAP; GROWTH; AL; NANOSTRUCTURES; FABRICATION; NANOWIRES; EMISSION; NANORODS;
D O I
10.1007/s13391-013-3312-y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sol-gel dip-coating was used to prepare ZnO thin films with relaxed residual stress by lowering the deposition temperature from room temperature (25 degrees C) to -25 degrees C. The effect of deposition temperature on the structural, optical, and electrical properties of the films was characterized using scanning electron microscopy (SEM), Raman spectroscopy, photoluminescence (PL), ultraviolet-visible (UV-Vis) spectroscopy and reflectance accessory, and the van der Pauw method. All the thin films were deposited successfully onto quartz substrates and exhibited fibrous root morphology. At low temperature, the deposition rate was higher than at room temperature (RT) because of enhanced viscosity of the films. Further, lowering the deposition temperature affected the structural, optical, and electrical properties of the ZnO thin films. The surface morphology, residual stress, PL properties, and optical transmittance and reflectance of the films were measured, and this information was used to determine the absorption coefficient, optical band gap, Urbach energy, refractive index, refractive index at infinite wavelength, extinction coefficient, single-oscillator energy, dispersion energy, average oscillator wavelength, moments M-1 and M-3, dielectric constant, optical conductivity, and electrical resistivity of the ZnO thin films.
引用
收藏
页码:869 / 878
页数:10
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