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Structural and Morphological study of ZnO-Ag thin films synthesized by reactive magnetron co-sputtering
被引:14
作者:
Francq, R.
[1
,2
]
Snyders, R.
[1
,2
]
Cormier, P. -A.
[2
]
机构:
[1] Mat Nova Res Ctr, Ave Copern 1, Mons, Belgium
[2] Univ Mons, Chim Interact Plasma Surface, CIRMAP, Pl Parc 20, Mons, Belgium
来源:
关键词:
LOW-EMISSIVITY COATINGS;
DOPED ZNO;
PHOTOCATALYTIC ACTIVITY;
SPUTTERING SYSTEM;
SILVER MIGRATION;
ANTIBACTERIAL;
NANOPARTICLES;
DEGRADATION;
MOISTURE;
SURFACE;
D O I:
10.1016/j.vacuum.2016.10.024
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Zinc oxide (ZnO) is well-known to present, among other properties, a good antibacterial activity which could be enhanced by the addition of Ag. The efficiency of ZnO-Ag films is correlated to the Ag concentration which should not exceed a threshold of a few atomic percent. Therefore it is necessary to develop a synthesis method allowing a perfect control of the film properties which can be easily transferred to the industry. In this context, we have developed a reactive magnetron co-sputtering process, in which, a Zn and an Ag metallic targets are co-sputtered in Ar-O-2 gas mixtures. ZnO-Ag thin films were successfully grown, in which the Ag concentration can be tuned with a precision of 0.2%. The experimental data reveal that the incorporation of Ag disturbs the ZnO crystalline structure, and that Ag migrates to the film surface and agglomerates as a function of time for at%Ag > 1.5%. The latter phenomenon takes place several days after the film synthesis when they are stored under ambient conditions, and is associated to oxydo-reduction reactions between oxygen and silver atoms. (C) 2016 Published by Elsevier Ltd.
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页码:1 / 7
页数:7
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