Structural and Morphological study of ZnO-Ag thin films synthesized by reactive magnetron co-sputtering

被引:14
作者
Francq, R. [1 ,2 ]
Snyders, R. [1 ,2 ]
Cormier, P. -A. [2 ]
机构
[1] Mat Nova Res Ctr, Ave Copern 1, Mons, Belgium
[2] Univ Mons, Chim Interact Plasma Surface, CIRMAP, Pl Parc 20, Mons, Belgium
关键词
LOW-EMISSIVITY COATINGS; DOPED ZNO; PHOTOCATALYTIC ACTIVITY; SPUTTERING SYSTEM; SILVER MIGRATION; ANTIBACTERIAL; NANOPARTICLES; DEGRADATION; MOISTURE; SURFACE;
D O I
10.1016/j.vacuum.2016.10.024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Zinc oxide (ZnO) is well-known to present, among other properties, a good antibacterial activity which could be enhanced by the addition of Ag. The efficiency of ZnO-Ag films is correlated to the Ag concentration which should not exceed a threshold of a few atomic percent. Therefore it is necessary to develop a synthesis method allowing a perfect control of the film properties which can be easily transferred to the industry. In this context, we have developed a reactive magnetron co-sputtering process, in which, a Zn and an Ag metallic targets are co-sputtered in Ar-O-2 gas mixtures. ZnO-Ag thin films were successfully grown, in which the Ag concentration can be tuned with a precision of 0.2%. The experimental data reveal that the incorporation of Ag disturbs the ZnO crystalline structure, and that Ag migrates to the film surface and agglomerates as a function of time for at%Ag > 1.5%. The latter phenomenon takes place several days after the film synthesis when they are stored under ambient conditions, and is associated to oxydo-reduction reactions between oxygen and silver atoms. (C) 2016 Published by Elsevier Ltd.
引用
收藏
页码:1 / 7
页数:7
相关论文
共 47 条
[1]   Surface coating of small SiO2 particles with TiO2 thin layer by using barrel-sputtering system [J].
Akamaru, Satoshi ;
Higashide, Shingo ;
Hara, Masanori ;
Abe, Takayuki .
THIN SOLID FILMS, 2006, 513 (1-2) :103-109
[2]   Synthesis, characterization, photocatalytic and antibacterial activities of Ag-doped ZnO powders modified with a diblock copolymer [J].
Amornpitoksuk, Pongsaton ;
Suwanboon, Sumetha ;
Sangkanu, Suthinee ;
Sukhoom, Ampaitip ;
Muensit, Nantakan ;
Baltrusaitis, Jonas .
POWDER TECHNOLOGY, 2012, 219 :158-164
[3]   Photocatalytic activity of La-doped ZnO for the degradation of monocrotophos in aqueous suspension [J].
Anandan, S. ;
Vinu, A. ;
Lovely, K. L. P. Sheeja ;
Gokulakrishnan, N. ;
Srinivasu, P. ;
Mori, T. ;
Murugesan, V. ;
Sivamurugan, V. ;
Ariga, K. .
JOURNAL OF MOLECULAR CATALYSIS A-CHEMICAL, 2007, 266 (1-2) :149-157
[4]   A structure zone diagram including plasma-based deposition and ion etching [J].
Anders, Andre .
THIN SOLID FILMS, 2010, 518 (15) :4087-4090
[5]   Moisture degradation mechanism of silver-based low-emissivity coatings [J].
Ando, E ;
Miyazaki, M .
THIN SOLID FILMS, 1999, 351 (1-2) :308-312
[6]   Sputtered silver-based low-emissivity coatings with high moisture durability [J].
Ando, E ;
Suzuki, S ;
Aomine, N ;
Miyazaki, M ;
Tada, M .
VACUUM, 2000, 59 (2-3) :792-799
[7]   Silver-modified titanium dioxide thin films for efficient photodegradation of methyl orange [J].
Arabatzis, IM ;
Stergiopoulos, T ;
Bernard, MC ;
Labou, D ;
Neophytides, SG ;
Falaras, P .
APPLIED CATALYSIS B-ENVIRONMENTAL, 2003, 42 (02) :187-201
[8]   Synthesis and characterization of ZnO nanowires and their integration into dye-sensitized solar cells [J].
Baxter, J. B. ;
Walker, A. M. ;
van Ommering, K. ;
Aydil, E. S. .
NANOTECHNOLOGY, 2006, 17 (11) :S304-S312
[9]   The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor [J].
Chang, JF ;
Kuo, HH ;
Leu, IC ;
Hon, MH .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (2-3) :258-264
[10]   Ag-Ti alloy used in ITO-metal-ITO transparency conductive thin film with good durability against moisture [J].
Chen, SW ;
Koo, CH ;
Huang, HE ;
Chen, CH .
MATERIALS TRANSACTIONS, 2005, 46 (11) :2536-2540