Precise processing of transparent material with femtosecond laser pulses

被引：1
|
作者：
Ma, L [1 ]
Shi, SX
Cheng, GH
Zhao, W
Chen, GF
机构：
[1] Xidian Univ, Sch Tech Phys, Lab 501, Xian 710071, Peoples R China
[2] Chinese Acad Sci, Precis Mech, Xian 710068, Peoples R China
来源：
2ND INTERNATIONAL CONFERENCE ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2006年 / 6149卷
关键词：
femtosecond laser pulse; laser precise processing; micromachining; transparent material;
D O I：
10.1117/12.674323
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Based on the physical mechanisms of fermosecond laser-transparent materials interactions, three kinds of micromachining including three dimensional data storage, optical waveguide network and grating with an amplified Ti:sapphire laser system are presented. These optical devices on different transparent materials by ferntosecond pulses are featured. The effect of laser machined parameters such as irradiated energy, the scanning speed and the recording material upon fabricated optical devices is studied in detail. From examples, the versatility of fermosecond laser precise micromachining technique is demonstrated. Practical application of ferntosecond laser materials processing is illuminated.
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页数：6
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