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[2]
Baker R., 1997, P 2 INT CMP MIC C SA, P1
[3]
BHUSHAN, 1999, PRINCIPLES APPL TRIB
[4]
CHEN LG, 2005, P 21 INT VMIC C HAW, P431
[5]
FUJITA T, 2005, P CMP MIC C, P452
[7]
HSU CL, 2005, P 21 INT VMIC C HAW, P311
[9]
Lawing A.S., 2005, ROHM HAAS ELECT MAT, P33
[10]
LAWING S, 2002, P 6 INT CMP MIC C SA, P310