LOW-RESONANT-FREQUENCY MICRO ELECTRET GENERATOR FOR ENERGY HARVESTING APPLICATION

被引：37

作者：

Edamoto, M. ^{[1
]}

Suzuki, Y. ^{[1
]}

Kasagi, N. ^{[1
]}

Kashiwagi, K. ^{[2
]}

Morizawa, Y. ^{[2
]}

Yokoyama, T. ^{[3
]}

Seki, T. ^{[3
]}

Oba, M. ^{[3
]}

机构：

[1] Univ Tokyo, Dept Mech Engn, 7-3-1 Hongo, Tokyo 113, Japan

[2] Asahi Glass Corp, Res Ctr, Kanagawa, Japan

[3] OMRON Corp, Core Technol Ctr, Kyoto, Japan

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805569

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Electrostatic levitation is adopted for the gap control. Large in-plane amplitude of 0.5 mm at the resonant frequency as low as 21 Hz has been achieved. We also demonstrate electret-powered operation of LED using a low-power-consumption impedance conversion circuit.

引用

页码：1059 / 1062

页数：4

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