Picosecond high-power 213-nm deep-ultraviolet laser generation using ß-BaB2O4 crystal

被引:21
作者
Chu, Yuxi [1 ]
Zhang, Xudong [1 ]
Chen, Binbin [2 ]
Wang, Jiazan [2 ]
Yang, Junhong [3 ]
Jiang, Rui [2 ,4 ]
Hu, Minglie [1 ]
机构
[1] Tianjin Univ, Sch Precis Instruments & Optoelect Engn, Minist Educ, Ultrafast Laser Lab,Key Lab Optoelect Informat S, Tianjin 300072, Peoples R China
[2] Beijing RS Laser Optoelect Technol CO Ltd, Beijing 100176, Peoples R China
[3] Key & Core Technol Innovat Inst Greater Bay Area, Shenzhen 510670, Guangdong, Peoples R China
[4] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
基金
美国国家科学基金会;
关键词
High power; Picosecond; Fifth-harmonics generation; Deep-ultraviolet; NM; SILICON; PULSES; 4TH;
D O I
10.1016/j.optlastec.2020.106657
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this study, we successfully demonstrate the achievement of 1.37 W average power for a picosecond deep ultraviolet (DUV) laser at 213 nm with a 1 MHz repetition rate using beta-BaB2O4 (BBO) crystals, which is the highest output power of a 213 nm picosecond laser system with an all-solid-state setup so far. The laser system generates over 1.3 mu J 213-nm pulse energy. The fifth harmonic is generated by sum-frequency generation of the 532 and 355 nm beams based on a "2 + 3" scheme. BBO crystals with lengths of 6, 8, and 10 mm are investigated. Furthermore, the DUV laser system produces a high-beam quality and narrow linewidth output. The DUV system can be stably maintained over 100 h with expanded beam sizes of 532 and 355 nm at 800 mW, and without requiring a change in the positions and temperatures of nonlinear crystals.
引用
收藏
页数:5
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共 21 条
  • [1] Record fifth-harmonic-generation efficiency producing 211 nm, joule-level pulses using cesium lithium borate
    Begishev, I. A.
    Bromage, J.
    Yang, S. T.
    Datte, P. S.
    Patankar, S.
    Zuegel, J. D.
    [J]. OPTICS LETTERS, 2018, 43 (11) : 2462 - 2465
  • [2] Begishev I. A., 1988, Soviet Journal of Quantum Electronics, V18, P224, DOI 10.1070/QE1988v018n02ABEH011480
  • [3] Begishev I.A., 2020, C LAS EL OSA OPT SOC
  • [4] CHEN CT, 1985, SCI SIN B-CHEM B A M, V28, P235
  • [5] Fourth harmonic generation based on miniaturized tunable bow-tie resonators
    Chen, Guozhu
    Zou, Hongxin
    He, Xiaokang
    Shen, Yong
    Liu, Qu
    [J]. OPTICS AND LASER TECHNOLOGY, 2019, 114 : 44 - 48
  • [6] Direct UV written integrated planar waveguides using a 213 nm laser
    Gow, Paul C.
    Bannerman, Rex H. S.
    Mennea, Paolo L.
    Holmes, Christopher
    Gates, James C.
    Smith, Peter G. R.
    [J]. OPTICS EXPRESS, 2019, 27 (20) : 29132 - 29137
  • [7] Kohler B., 2000, C LAS EL
  • [8] Programmable deep-UV laser platform for inspection and metrology
    Miyata, Kentaro
    Mohara, Mizuki
    Shimura, Kei
    Tanabashi, Akihiro
    Desbiens, Louis
    Roy, Vincent
    Taillon, Yves
    Nakayama, Shinichi
    Wada, Satoshi
    [J]. OPTICS LETTERS, 2019, 44 (22) : 5618 - 5621
  • [9] NEW NONLINEAR-OPTICAL CRYSTAL - CESIUM LITHIUM BORATE
    MORI, Y
    KURODA, I
    NAKAJIMA, S
    SASAKI, T
    NAKAI, S
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (13) : 1818 - 1820
  • [10] Detection of 30-40-nm particles on bulk-silicon and SOI wafers using deep UV laser scattering
    Okamoto, Akira
    Kuniyasu, Hitoshi
    Hattori, Takeshi
    [J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2006, 19 (04) : 372 - 380