Surface HCl treatment in ZnO photoconductive sensors

被引：22

作者：

Chang, S. P. ^{[1
,2
]}

Chuang, R. W. ^{[1
,2
,3
]}

Chang, S. J. ^{[1
,2
]}

Lu, C. Y. ^{[1
,2
]}

Chiou, Y. Z. ^{[4
]}

Hsieh, S. F. ^{[5
]}

机构：

[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan

[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan

[3] Natl Nano Device Labs, Tainan 74147, Taiwan

[4] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan

[5] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 17期

关键词：

ZnO; Photoconductive sensor; 1/f noise; Responsivity; Surface treatment; MOLECULAR-BEAM EPITAXY; CHEMICAL-VAPOR-DEPOSITION; ZNSE MSM PHOTODETECTORS; GAN CAP LAYERS; ULTRAVIOLET PHOTODETECTORS; THIN-FILMS; PLASMA; GROWTH; SAPPHIRE; CONTACTS;

D O I：

10.1016/j.tsf.2009.03.042

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we report the effect of surface HCl treatment on ZnO photoconductive sensors with Ni/Au electrodes after the etching process. Epitaxial ZnO photoconductive sensor film on sapphire substrates was fabricated and then treated with different HCl concentrations. With an incident light wavelength of 370 nm and an applied bias of 10 V, the responsivity of the sensor measured is around 141 mA/W after being treated with 0.7% HCl solution. The result indicates that the a larger surface available for photodetection could be realized by increasing the surface roughness of the ZnO photoconductive sensor. It was also found that the low-frequency and high-frequency noises of the fabricated sensors were dominated by 1/f-type and shot noises, respectively. (c) 2009 Elsevier B.V. All rights reserved.

引用

页码：5050 / 5053

页数：4

共 34 条

[1] Photodetectors on the base of ZnO thin films
Aghamalyan, NR
Hovsepyan, RK
Poghosyan, AR
Lazaryan, VG
[J]. PHOTOREFRACTIVE FIBER AND CRYSTAL DEVICES: MATERIALS, OPTICAL PROPERTIES, AND APPLICATIONS X, 2004, 5560 : 235 - 240
[2] Fabrication and characterization of n-ZnO/p-AlGaN heterojunction light-emitting diodes on 6H-SiC substrates
Alivov, YI
Kalinina, EV
Cherenkov, AE
Look, DC
Ataev, BM
Omaev, AK
Chukichev, MV
Bagnall, DM
[J]. APPLIED PHYSICS LETTERS, 2003, 83 (23) : 4719 - 4721
[3] Characterization of zinc oxide films grown by a newly developed plasma enhanced metal organic chemical vapor deposition employing microwave excited high density plasma
Asahara, Hirokazu
Inokuchi, Atsutoshi
Watanuki, Kohei
Hirayama, Masaki
Teramoto, Akinobu
Ohmi, Tadahiro
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (04) : 2994 - 2998
[4] A comparison of plasma-activated N2/O2 and N2O/O2 mixtures for use in ZnO:N synthesis by chemical vapor deposition
Barnes, TM
Leaf, J
Hand, S
Fry, C
Wolden, CA
[J]. JOURNAL OF APPLIED PHYSICS, 2004, 96 (12) : 7036 - 7044
[5] Photoconductive UV detectors on sol-gel-synthesized ZnO films
Basak, D
Amin, G
Mallik, B
Paul, GK
Sen, SK
[J]. JOURNAL OF CRYSTAL GROWTH, 2003, 256 (1-2) : 73 - 77
[6] Nitride-based MIS-like photodiodes with semiinsulating Mg-doped GaN cap layers
Chang, S. J.
Yu, C. L.
Chuang, R. W.
Chang, P. C.
Lin, Y. C.
Jhan, Y. W.
Chen, C. H.
[J]. IEEE SENSORS JOURNAL, 2006, 6 (05) : 1043 - 1044
[7] ITO/Homoepitaxial ZnSe/ITO MSM sensors with thermal annealing
Chang, S. J.
Lin, T. K.
Su, Y. -K.
Chiou, Y. Z.
Wang, C. K.
Chang, S. P.
Chang, C. M.
Tang, J. J.
Huang, B. R.
[J]. IEEE SENSORS JOURNAL, 2006, 6 (04) : 945 - 949
[8] Homoepitaxial ZnSe MSM photodetectors with various transparent electrodes
Chang, SJ
Lin, TK
Su, YK
Chiou, YZ
Wang, CK
Chang, SP
Chang, CM
Tang, JJ
Huang, BR
[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 127 (2-3): : 164 - 168
[9] Layer-by-layer growth of ZnO epilayer on Al2O3(0001) by using a MgO buffer layer
Chen, YF
Ko, HJ
Hong, SK
Yao, T
[J]. APPLIED PHYSICS LETTERS, 2000, 76 (05) : 559 - 561
[10] Excitonic properties of the polar faces of bulk ZnO after wet etching
Fryar, J
McGlynn, E
Henry, MO
Cafolla, AA
Hanson, CJ
[J]. PHYSICA B-CONDENSED MATTER, 2003, 340 : 210 - 215

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