Evidence of Supercoupling Effect in Ultrathin Silicon Layers Using a Four-Gate MOSFET

被引:24
作者
Cristoloveanu, S. [1 ]
Athanasiou, S. [1 ,2 ]
Bawedin, M. [1 ]
Galy, Ph. [2 ]
机构
[1] Minatec, Grenoble Inst Technol, LAboratoire Hyperfrequences & Caracterisat, Inst Microelect Electromagnetisme & Photon, F-38016 Grenoble 1, France
[2] STMicroelectronics, F-38926 Crolles, France
关键词
FDSOI MOSFET; four-gate transistor; silicon-on-insulator; supercoupling; SOI MOSFETS; THRESHOLD VOLTAGE; FILM; MOBILITY;
D O I
10.1109/LED.2016.2637563
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The supercoupling effect is demonstrated experimentally by monitoring the electron and hole currents in a field-effect transistor provided with p(+) and n(+) contacts. According to the polarity of the voltage applied to the front and back gates, only electrons or holes can be detected in 7-nm thick silicon layers. Thicker layers are not affected by supercoupling and can accommodate electrons and holes together.
引用
收藏
页码:157 / 159
页数:3
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