Accelerated gate-oxide breakdown in mixed-voltage I/O circuits

被引:30
作者
Furukawa, T
Turner, D
Mittl, S
Maloney, M
Serafin, R
Clark, W
Bialas, J
Longenbach, L
Howard, J
机构
来源
1997 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 35TH ANNUAL | 1997年
关键词
D O I
10.1109/RELPHY.1997.584255
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a new mechanism of gate-oxide breakdown fails observed in mixed-voltage I/O circuits during an accelerated product stress. Although no gate-oxide breakdown was expected from Fowler-Nordheim stress, gate-oxide fails were observed only in short-channel PFETs of the mixed-voltage I/O circuits. Accelerated gate-oxide breakdown was attributed to non-conductive channel hot-electron injection at the drain edge.
引用
收藏
页码:169 / 173
页数:5
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