HgTe/HgCdTe superlattices grown on CdTe/Si by molecular beam epitaxy for infrared detection

被引:24
|
作者
Selamet, Y [1 ]
Zhou, YD
Zhao, J
Chang, Y
Becker, CR
Ashokan, R
Grein, CH
Sivananthan, S
机构
[1] Univ Illinois, Microphys Lab, Chicago, IL 60637 USA
[2] Univ Wurzburg, Inst Phys, D-97074 Wurzburg, Germany
关键词
CdTe/Si substrates; x-ray; rocking curves; superlattices; MBE;
D O I
10.1007/s11664-004-0038-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-quality HgTe/CdTe superlattices (SLs) and device structures incorporating them were grown by molecular beam epitaxy (MBE) on CdTe/Si substrates. In-situ techniques, such as reflection, high-energy electron diffraction and spectroscopic ellipsometry, were extensively used to rigorously control the growth parameters. The full width at half maximum (FWHM) of x-ray double-crystal rocking curves (DCRCs) were 100-150 arcsec, comparable to those of HgCdTe alloys grown on the same type of substrates. The room-temperature Fourier transform infrared (FTIR) spectrum exhibits two-dimensional features characteristic of SLs. Trial devices in a p(+)-n(-)-n(+) format were fabricated by diffusing gold in order to further evaluate the HgTe/CdTe SL performance. Gold diffusion was chosen to fabricate photovoltaic junctions in order to preserve the structural integrity of the SLs during the device processing. Though no attempt was made in the current study to optimize the junction properties by Au diffusion, this method has proven to be very useful for rapid preliminary evaluation. The measured spectral-response and detectivity data indicate the possibility to fabricate photovoltaic devices on an HgTe/CdTe SL, although further work is needed to optimize the p-n junction fabrication.
引用
收藏
页码:503 / 508
页数:6
相关论文
共 50 条
  • [1] HgTe/HgCdTe superlattices grown on CdTe/Si by molecular beam epitaxy for infrared detection
    Y. Selamet
    Y. D. Zhou
    J. Zhao
    Y. Chang
    C. R. Becker
    R. Ashokan
    C. H. Grein
    S. Sivananthan
    Journal of Electronic Materials, 2004, 33 : 503 - 508
  • [2] HGTE/CDTE SUPERLATTICES GROWN BY MOLECULAR-BEAM EPITAXY
    FAURIE, JP
    BOUKERCHE, M
    SIVANANTHAN, S
    RENO, J
    HSU, C
    SUPERLATTICES AND MICROSTRUCTURES, 1985, 1 (03) : 237 - 244
  • [3] Arsenic δ-doped HgTe/HgCdTe superlattices grown by molecular beam epitaxy
    Tsen, G. K. O.
    Musca, C. A.
    Dell, J. M.
    Antoszewski, J.
    Faraone, L.
    Becker, C. R.
    APPLIED PHYSICS LETTERS, 2008, 92 (08)
  • [4] HGTE AND CDTE EPITAXIAL LAYERS AND HGTE-CDTE SUPERLATTICES GROWN BY LASER MOLECULAR-BEAM EPITAXY
    CHEUNG, JT
    NIIZAWA, G
    MOYLE, J
    ONG, NP
    PAINE, BM
    VREELAND, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04): : 2086 - 2090
  • [5] CARRIER LIFETIME IN HGTE/CDTE SUPERLATTICES GROWN BY PHOTOASSISTED MOLECULAR-BEAM EPITAXY
    REISINGER, AR
    HARRIS, KA
    MYERS, TH
    YANKA, RW
    MOHNKERN, LM
    HOFFMAN, CA
    APPLIED PHYSICS LETTERS, 1992, 61 (06) : 699 - 701
  • [6] CHEMICAL BEAM EPITAXY OF CDTE, HGTE, AND HGCDTE
    BENZ, RG
    WAGNER, BK
    RAJAVEL, D
    SUMMERS, CJ
    JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) : 725 - 729
  • [7] INFRARED PHOTOCONDUCTOR FABRICATED WITH HGTE/CDTE SUPERLATTICE GROWN BY MOLECULAR-BEAM EPITAXY
    QIU, YM
    HE, L
    LI, J
    YUAN, SX
    BECKER, CR
    LANDWEHR, G
    APPLIED PHYSICS LETTERS, 1993, 62 (10) : 1134 - 1136
  • [9] SHUBNIKOV-DEHAAS OSCILLATIONS IN HGTE/CDTE SUPERLATTICES GROWN BY LASER MOLECULAR-BEAM EPITAXY
    GHENIM, L
    MANI, RG
    ANDERSON, JR
    CHEUNG, JT
    PHYSICAL REVIEW B, 1989, 39 (02): : 1419 - 1421
  • [10] HGTE-CDTE SUPERLATTICES GROWN ON GAAS (100) ORIENTED SUBSTRATES BY MOLECULAR-BEAM EPITAXY
    BALLINGALL, JM
    LEOPOLD, DJ
    WROGE, ML
    PETERMAN, DJ
    MORRIS, BJ
    BROERMAN, JG
    APPLIED PHYSICS LETTERS, 1986, 49 (14) : 871 - 873