Adherent diamond-like carbon coatings on metals via PECVD and IBAD

被引：10
作者：
Capote, Gil
Bonetti, Luis F.
Santos, Lucia V.
Trava-Airoldi, Vladimir J.
Corat, Evaldo J.
机构：
[1] Inst Nacl Pesquisas Espaciais, Lab Associado Sensores & Mat, BR-12245970 Sao Jose Dos Campos, Brazil
[2] Ctr Tecn Aeroesp, Inst Tecnol Aeronaut, Sao Jose Dos Campos, Brazil
来源：
BRAZILIAN JOURNAL OF PHYSICS | 2006年 / 36卷 / 3B期
关键词：
diamond-like carbon; plasma enhanced chemical vapor deposition; ion beam-assisted deposition; AMORPHOUS-CARBON; FILMS; DEPOSITION;
D O I：
10.1590/S0103-97332006000600050
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVD and IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:H films on the metal substrates. The XPS technique was employed to analyze the chemical bondings within the interfaces. The elemental composition and atomic density of the films were determined by ion beam analysis. The film microstructure was studied by means of Raman scattering spectroscopy. The mechanical properties were determined by means of stress and hardness measurements. The adherence was evaluated by means of scratch tests. The tests showed that the composition, the microstructure, and the mechanical properties of the films depend on the intensity of the ion bombardment and on the ion current.
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收藏
页码：986 / 989
页数：4
相关论文
共 14 条
[1]   Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD [J].
Buršíková, V. ;
Navrátil, V. ;
Zajíčková, L. ;
Janča, J. .
Materials Science and Engineering: A, 2002, 324 (1-2) :251-254
[2]   USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].
DILLON, RO ;
WOOLLAM, JA ;
KATKANANT, V .
PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489
[3]   Enhanced adhesion of diamond-like carbon films with a composition-graded intermediate layer [J].
Hou, QR ;
Gao, J .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (03) :343-347
[4]   Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD [J].
Jun, Q ;
Luo, JB ;
Wen, SZ ;
Wang, J ;
Li, WZ .
SURFACE & COATINGS TECHNOLOGY, 2000, 128 :324-328
[5]   Application of diamond-like carbon films to spacer tools for electron guns of cathode ray tube (CRT) [J].
Jun, Y ;
Choi, JY ;
Lee, KR ;
Jeong, BK ;
Kwon, SK ;
Hwang, CH .
THIN SOLID FILMS, 2000, 377 :233-238
[6]   END-HALL ION-SOURCE [J].
KAUFMAN, HR ;
ROBINSON, RS ;
SEDDON, RI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2081-2084
[7]   Nanoscale manipulation of tetrahedral amorphous carbon films [J].
Lee, CS ;
Kim, TY ;
Lee, KR ;
Yoon, KH .
THIN SOLID FILMS, 2004, 447 :169-173
[8]   SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES [J].
LIFSHITZ, Y ;
KASI, SR ;
RABALAIS, JW ;
ECKSTEIN, W .
PHYSICAL REVIEW B, 1990, 41 (15) :10468-10480
[9]   Pulsed laser deposition of diamond-like carbon films: reducing internal stress by thermal annealing [J].
Mosaner, P ;
Bonelli, M ;
Miotello, A .
APPLIED SURFACE SCIENCE, 2003, 208 :561-565
[10]   Diamond-like amorphous carbon [J].
Robertson, J .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2002, 37 (4-6) :129-281
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