Installation and Commissioning of a Large Area Coating System for Neutron and X-ray Optical Devices

被引：1

作者：

Biswas, A. ^{[1
]}

Haque, Sk Maidul ^{[1
]}

Misal, J. ^{[1
]}

Lagoo, K. D. ^{[2
]}

Veerapur, R. D. ^{[2
]}

Padmanabhan, M. ^{[2
]}

Puri, R. K. ^{[2
]}

Sampathkumar, R. ^{[1
]}

Ajaykumar ^{[1
]}

Bhattacharya, Debarati ^{[3
]}

Bhattacharyya, D. ^{[1
]}

Sahoo, N. K. ^{[1
]}

机构：

[1] Bhabha Atom Res Ctr, Atom & Mol Phys Div, Bombay 400085, Maharashtra, India

[2] Bhabha Atom Res Ctr, Div Remote Handling & Robot, Mumbai- 400085, India

[3] Bhabha Atom Res Ctr, Div Solid State Phys, Bombay 400085, Maharashtra, India

来源：

SOLID STATE PHYSICS: PROCEEDINGS OF THE 58TH DAE SOLID STATE PHYSICS SYMPOSIUM 2013, PTS A & B | 2014年 / 1591卷

关键词：

DC/RF sputtering; metal film; Multilayer; neutron supermirror;

D O I：

10.1063/1.4872827

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within +/- 3.5% over the 1500mm length and within +/- 4.8% over the 150mm width.

引用

页码：985 / 987

页数：3

共 5 条

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