Effect of AlGaN interlayer on the GaN/InGaN/GaN/AlGaN multi-quantum wells structural properties toward red light emission

被引:9
|
作者
Ruterana, Pierre [1 ]
Morales, Magali [1 ]
Chery, Nicolas [1 ]
Thi Huong Ngo [2 ,3 ,4 ]
Chauvat, Marie-Pierre [1 ]
Lekhal, Kaddour [2 ]
Damilano, Benjamin [2 ]
Gil, Bernard [3 ]
机构
[1] Univ Caen Normandie, CIMAP, UMR 6252, CNRS,ENSICAEN,CEA, 6 Blvd Marechal Juin, F-14000 Caen, France
[2] Univ Cote Azur, CNRS, CRHEA, Rue Bernard Gregory, F-06560 Valbonne, France
[3] CNRS, L2C, Case Courrier 074, F-34095 Montpellier 5, France
[4] Univ Montpellier, Case Courrier 074, F-34095 Montpellier 5, France
关键词
QUANTUM-WELLS; GAN LAYERS; ATOMIC CONFIGURATIONS; ELECTRON-MICROSCOPY; FORMATION MECHANISM; STACKING-FAULTS; 0001; SAPPHIRE; V-DEFECTS; INGAN; STRAIN;
D O I
10.1063/5.0027119
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work, InGaN/GaN multi-quantum Wells (MQWs) with strain compensating AlGaN interlayers grown by metalorganic vapor-phase epitaxy have been investigated by high-resolution x-ray diffraction, transmission electron microscopy, and photoluminescence (PL). For different AlGaN strain compensating layer thicknesses varying from 0 to 10.6nm, a detailed x-ray diffraction analysis shows that the MQW stack becomes completely strained on GaN along a and c. The compensation is full from an AlGaN layer thickness of 5.2nm, and this does not change up to the largest one that has been investigated. In this instance, AlGaN was grown at the same temperature as the GaN barrier, on top of a protective 3nm GaN. It is found that the crystalline quality of the system is progressively degraded when the thickness of the AlGaN interlayer is increased through strain concentrated domains, which randomly form inside the 3nm GaN low temperature layer. These domains systematically contribute to a local decrease of the QW thickness and most probably to an efficient localization of carriers. Despite these defects, the PL is highly improved toward the red wavelengths and compares with the reports on ultrathin AlGaN layers where this has been correlated with the improvement of the crystalline quality, although with less strain compensation.
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页数:11
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