Standard-based direct calibration method for scanning thermal microscopy nanoprobes

被引:10
作者
Wielgoszewski, Grzegorz [1 ]
Babij, Michal [1 ]
Szeloch, Roman F. [1 ]
Gotszalk, Teodor [1 ]
机构
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Div Metrol Micro & Nanostruct, PL-50372 Wroclaw, Poland
关键词
Scanning thermal microscope; Calibration; Temperature measurement; INTERNATIONAL TEMPERATURE SCALE; MECHANISMS; TRANSPORT;
D O I
10.1016/j.sna.2014.03.035
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A direct calibration method, which is based on international temperature standards, developed for scanning thermal microscopy (SThM) nanoprobes is presented. The idea of calibration is intended mostly for use with thermoresistive SThM nanoprobes and is based on referencing the tip resistance to melting or freezing points of materials, which are contacted directly by the SThM tip. Particularly, in the presented experiment the gallium melting point is used, which is a defining fixed point of the International Temperature Scale of 1990 (ITS-90). Other points suitable for the SThM calibration are suggested, which makes the presented attempt the first step toward linking the quantitative SThM experiments with international temperature standards and therefore envisaging the traceability of nanoscale temperature measurements. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:1 / 6
页数:6
相关论文
共 45 条
  • [31] Thermal nano-probe
    Rangelow, IW
    Gotszalk, T
    Abedinov, N
    Grabiec, P
    Edinger, K
    [J]. MICROELECTRONIC ENGINEERING, 2001, 57-8 : 737 - 748
  • [32] Thermal transport mechanisms at nanoscale point contacts
    Shi, L
    Majumdar, A
    [J]. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2002, 124 (02): : 329 - 337
  • [33] Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy
    Shi, L
    Kwon, O
    Miner, AC
    Majumdar, A
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (03) : 370 - 378
  • [34] Strouse C.F., 2008, STANDARD PLATINUM RE
  • [35] Thermal contact calibration between a thermocouple probe and a microhotplate
    Thiery, L.
    Toullier, S.
    Teyssieux, D.
    Briand, D.
    [J]. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2008, 130 (09):
  • [36] Tsukruk VV, 2003, THERMOCHIM ACTA, V395, P151
  • [37] The "millipede" -: Nanotechnology entering data storage
    Vettiger, P
    Cross, G
    Despont, M
    Drechsler, U
    Dürig, U
    Gotsmann, B
    Häberle, W
    Lantz, MA
    Rothuizen, HE
    Stutz, R
    Binnig, GK
    [J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2002, 1 (01) : 39 - 55
  • [38] Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy
    Wielgoszewski, G.
    Sulecki, P.
    Gotszalk, T.
    Janus, P.
    Szmigiel, D.
    Grabiec, P.
    Zschech, E.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (06): : C6N7 - C6N11
  • [39] A high-resolution measurement system for novel scanning thermal microscopy resistive nanoprobes
    Wielgoszewski, Grzegorz
    Sulecki, Przemyslaw
    Janus, Pawel
    Grabiec, Piotr
    Zschech, Ehrenfried
    Gotszalk, Teodor
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2011, 22 (09)
  • [40] Scanning thermal microscopy: A nanoprobe technique for studying the thermal properties of nanocomponents
    Wielgoszewski, Grzegorz
    Sulecki, Przemyslaw
    Gotszalk, Teodor
    Janus, Pawel
    Grabiec, Piotr
    Hecker, Michael
    Ritz, Yvonne
    Zschech, Ehrenfried
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2011, 248 (02): : 370 - 374