Standard-based direct calibration method for scanning thermal microscopy nanoprobes

被引：10

作者：

Wielgoszewski, Grzegorz ^{[1
]}

Babij, Michal ^{[1
]}

Szeloch, Roman F. ^{[1
]}

Gotszalk, Teodor ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Div Metrol Micro & Nanostruct, PL-50372 Wroclaw, Poland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 214卷

关键词：

Scanning thermal microscope; Calibration; Temperature measurement; INTERNATIONAL TEMPERATURE SCALE; MECHANISMS; TRANSPORT;

D O I：

10.1016/j.sna.2014.03.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A direct calibration method, which is based on international temperature standards, developed for scanning thermal microscopy (SThM) nanoprobes is presented. The idea of calibration is intended mostly for use with thermoresistive SThM nanoprobes and is based on referencing the tip resistance to melting or freezing points of materials, which are contacted directly by the SThM tip. Particularly, in the presented experiment the gallium melting point is used, which is a defining fixed point of the International Temperature Scale of 1990 (ITS-90). Other points suitable for the SThM calibration are suggested, which makes the presented attempt the first step toward linking the quantitative SThM experiments with international temperature standards and therefore envisaging the traceability of nanoscale temperature measurements. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：1 / 6

页数：6

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