Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion

被引：20

作者：

Akiyama, T ^{[1
]}

Staufer, U ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 21期

关键词：

D O I：

10.1063/1.126549

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A microfabricated cantilever with integrated comb-shape electrostatic actuator is proposed to yield a high-speed feedback motion in atomic force microscopy with optical deflection detection. The actuator has a linear response to the driving voltage. The dynamic range of tip amounts to 1 mu m with an actuation efficiency of 11.4 nm/V. Using this cantilever, an imaging bandwidth of similar to 80 kHz was obtained. High-speed constant force imaging with a tip velocity of 1.22 mm/s is demonstrated. The tip-sample force is verified to be constant by using a cantilever with an integrated piezoresistor as the scanned sample. (C) 2000 American Institute of Physics. [S0003-6951(00)05321-3].

引用

页码：3139 / 3141

页数：3

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