Magnetic properties of oxygenated carbon nitride films from RF-discharge in an acetylene, nitrogen, and oxygen mixture environments

被引：1

作者：

Garcia-Quiroz, A ^{[1
]}

Azevedo, DL ^{[1
]}

da Silva, EC ^{[1
]}

机构：

[1] Univ Estadual Campinas Zeferino Vaz, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP, Brazil

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2002年 / 63卷 / 10期

基金：

巴西圣保罗研究基金会;

关键词：

plasma deposition; electron paramagnetic resonance;

D O I：

10.1016/S0022-3697(02)00171-3

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Properties of oxygenated carbon nitride films have attracted the attention of physics researchers due to their magnetic and physical properties, as well as for their usefulness in the industry. The free radicals were investigated using electron paramagnetic resonance applied in the study of spin concentration due to the different mechanism of preparation of carbon nitride films by RF-discharge with different kinds of plasma. Unpaired spin concentrations, in the order of 10(20) per cm(3), were measured and their time recombination dependency was important in those films. The films were grown by plasma enhanced chemical vapor deposition using mixtures of hydrocarbons, N-2 and O-2 in different proportions. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：1863 / 1866

页数：4

共 11 条

[1] Silicon oxide film preparation by RF plasma-enhanced MOCVD using hexamethyldisiloxane [J].

Ebihara, Kenji ;

Fujishima, Tomoyuki ;

Kojyo, Daiichi ;

Murata, Masayosi .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1993, 2 (01) :14-17

[2] New DLC coating method using magnetron plasma in an unbalanced magnetic field [J].

Fujimaki, S ;

Kashiwase, H ;

Kokaku, Y .

VACUUM, 2000, 59 (2-3) :657-664

[3]

GRILL A, 1998, SURFACE COATINGS TEC, V94, P507

[4] An investigation of the structural properties of diamond films deposited by pulsed bias enhanced hot filament CVD [J].

Hassan, IU ;

Rego, CA ;

Ali, N ;

Ahmed, W ;

O'Hare, IP .

THIN SOLID FILMS, 1999, 355 :134-138

[5]

HIRAMATSU K, 1997, ANTIBIOT CHEMOTHER, V1, P5

[6] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS [J].

LIU, AY ;

COHEN, ML .

SCIENCE, 1989, 245 (4920) :841-842

[7] Dynamic MC simulations of diamond-like carbon film synthesis by plasma-based ion implantation [J].

Miyagawa, Y ;

Nakao, S ;

Ikeyama, M ;

Miyagawa, S .

SURFACE & COATINGS TECHNOLOGY, 2001, 136 (1-3) :122-126

[8] Modeling and experimental comparison of pulsed plasma deposition of aniline [J].

Shepsis, LV ;

Pedrow, PD ;

Mahalingam, R ;

Osman, MA .

THIN SOLID FILMS, 2001, 385 (1-2) :11-21

[9] Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings [J].

Widlow, I ;

Chung, YW .

BRAZILIAN JOURNAL OF PHYSICS, 2000, 30 (03) :490-498

[10] Preparation and characterization of superhard CNx/ZrN multilayers [J].

Wu, ML ;

Lin, XW ;

Dravid, VP ;

Chung, YW ;

Wong, MS ;

Sproul, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (03) :946-950

← 1 2 →