Imaging and analysis in materials science by low vacuum scanning electron microscopy

被引:4
作者
Thiel, BL [1 ]
机构
[1] Univ Cambridge, Cavendish Lab, Polymers & Colloids Grp, Cambridge CB2 1TN, England
关键词
scanning electron microscopy; environmental SEM; low vacuum SEM; imaging; analysis; electronic materials;
D O I
10.1179/095066004225019191
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Low vacuum scanning electron microscopes (SEMs) enable stable imaging of non-conductive samples by allowing a small pressure of gas in the specimen chamber. However, the gaseous ions that electrically stabilise the specimens can also give rise to potentially useful new contrast mechanisms. The charge stabilisation process in these instruments is summarised and recent efforts to understand the new complex, dynamic contrast mechanisms are reviewed. Several significant low vacuum and environmental SEM applications papers are critically considered, and the results evaluated in light of the imaging theory presented. Although the applications have been chosen to represent a wide range of topics of interest to materials scientists, a slight emphasis has been placed on applications relevant to the electronics industry. In particular, it should be noted that many of the dynamic contrast effects have characteristic time constants that are comparable to experimental parameters such as scan rate. The potential for using these effects to map electronic inhomogeneities and defects is discussed.
引用
收藏
页码:109 / 122
页数:14
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