Thin film thickness sensor based on a new magnetostrictive delay line arrangement

被引：4
|
作者：
Hristoforou, E [1 ]
Chiriac, H
Avaritsiotis, JN
机构：
[1] TEI Chalkis, Lab Metrol, Psahna Euboea 34400, Greece
[2] Natl Inst R&D Tech Phys, Iasi 6600, Romania
[3] Natl Tech Univ Athens, GR-15773 Athens, Greece
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 76卷 / 1-3期
关键词：
magnetostriction; thin films; film thickness sensors;
D O I：
10.1016/S0924-4247(98)00376-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we demonstrate the application of a new magnetostrictive delay line (MDL) arrangement in thin film thickness determination, during film production. According to this new set-up, the MDL arrangement can be miniaturized in the micrometer scale, without the use of coils and air gaps, thus allowing a simple and cost-effective manufacturing process. Experimental results indicate monotonic response and absence of hysteresis, thus allowing a good uncertainty of measurement. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：156 / 161
页数：6
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