The kinetics of the formation of a solid solution in an Ag-Pd polycrystalline film system

被引:17
作者
Kryshtal, A. P. [1 ]
Bogatyrenko, S. I. [1 ]
Sukhov, R. V. [1 ]
Minenkov, A. A. [1 ]
机构
[1] Kharkov Natl Univ, UA-61022 Kharkov, Ukraine
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2014年 / 116卷 / 04期
关键词
THIN-FILMS; DIFFUSION; PALLADIUM; METALS;
D O I
10.1007/s00339-014-8349-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The kinetics of homogenization of an Ag-Pd film system with a total thickness of 120 nm and a grain size of 5-10 nm has been studied by means of in situ TEM heating. The film system has been formed by the sequential deposition of components in a vacuum on the substrate at room temperature. It has been shown that diffusion processes are activated, starting from the temperature 453 K, resulting in complete homogenization of the film system at 573 K with preservation of its fine-grained structure. The effective diffusion coefficient in the Ag-Pd system was measured as 10(-17)-10(-18) m(2)/s at 553 K. A possible mechanism of homogenization is discussed.
引用
收藏
页码:1891 / 1896
页数:6
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