Electronegative plasmas - why are they so different?

被引：92
作者：
Franklin, RN [1 ]
机构：
[1] Open Univ, Oxford Res Unit, Foxcombe Hall, Oxford OX1 5HR, England
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2002年 / 11卷 / 3A期
关键词：
D O I：
10.1088/0963-0252/11/3A/304
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
This paper seeks to summarize the work that has gone on over the past 20 years in plasmas that has become of great commercial importance but was not studied in depth previously. It points up the differences between conventional electropositive plasmas and those where negative ions dominate. It removes some of the errors and misunderstandings that have occurred and tries to bring the field into a coherent consistent whole.
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收藏
页码：A31 / A37
页数：7
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