A novel patterning effect during high frequency laser micro-cutting of hard ceramics for microelectronics applications

被引：6

作者：

Savriama, Guillaume ^{[1
,2
]}

Jarry, Vincent ^{[2
]}

Barreau, Laurent ^{[2
]}

Boulmer-Leborgne, Chantal ^{[1
]}

Semmar, Nadjib ^{[1
]}

机构：

[1] Univ Orleans, GREMI UMR 7344, CNRS, F-45067 Orleans, France

[2] STMicroelectronics, F-37071 Tours 2, France

来源：

APPLIED SURFACE SCIENCE | 2014年 / 302卷

关键词：

Laser micromachining; Sapphire; Glass; Phase explosion; Microelectronics industry; PHASE EXPLOSION; ABLATION;

D O I：

10.1016/j.apsusc.2014.02.077

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper investigates the laser micro-cutting of wide band gap materials for microelectronics industry purposes. An ultraviolet (355 nm) diode-pumped solid-state (DPSS) nanosecond laser was used in this investigation. The laser energy varied from 7 to 140 mu J/pulse with typical frequencies from 40 to 200 kHz. The effect of pulse energy and scanning speed on the depth of the cutting street of alpha-Al2O3 and glass was studied. Typical depths of 200 mu m were achieved on alpha-Al2O3 for 140 mu J/pulse, 40 kHz at 13 mm/s. SEM images showed periodic patterns produced by periodic explosive boiling that can influence the achieved depth. The shape, size and periodicity of the recast material depended on the feed rate and the laser beam frequency. This periodic removal mechanism seems to be specific to dielectrics since it was not observed for semiconductors such as silicon or silicon carbide. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：163 / 168

页数：6

共 22 条

[1]

BULGAKOVA NM, 2001, APPL PHYS A, V73

[2] Effects of laser operating parameters on metals micromachining with ultrafast lasers [J].

Cheng, J. ;

Perrie, W. ;

Edwardson, S. P. ;

Fearon, E. ;

Dearden, G. ;

Watkins, K. G. .

APPLIED SURFACE SCIENCE, 2009, 256 (05) :1514-1520

[3] Defect formation in glass welding by means of ultra short laser pulses [J].

Cvecek, Kristian ;

Alexeev, Ilya ;

Miyamoto, Isamu ;

Schmidt, Michael .

LASER ASSISTED NET SHAPE ENGINEERING 6, PROCEEDINGS OF THE LANE 2010, PART 1, 2010, 5 :495-502

[4] HIGH-INTENSITY LASER-INDUCED VAPORIZATION AND EXPLOSION OF SOLID MATERIAL [J].

DABBY, FW ;

PAEK, U .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1972, QE 8 (02) :106-&

[5] Experimental study of Nd:YAG laser beam machining -: An overview [J].

Dubey, Avanish Kr. ;

Yadava, Vinod .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 195 (1-3) :15-26

[6] THERMODYNAMIC PROPERTIES OF DIATOMIC GASES AT HIGH-TEMPERATURES - AN IMPROVED CALCULATIONAL APPROACH FOR THE JANAF THERMOCHEMICAL TABLES [J].

FRURIP, DJ ;

SYVERUD, AN ;

CHASE, MW .

JOURNAL OF NUCLEAR MATERIALS, 1985, 130 (FEB) :189-198

[7] Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics [J].

Gamaly, EG ;

Rode, AV ;

Luther-Davies, B ;

Tikhonchuk, VT .

PHYSICS OF PLASMAS, 2002, 9 (03) :949-957

[8] Phase explosion induced by high-repetition rate pulsed laser [J].

Han, Jinghua ;

Li, Yaguo ;

Zhang, Qiuhui ;

Fu, Yuqing ;

Fan, Weixing ;

Feng, Guoying ;

Yang, Liming ;

Xie, Xudong ;

Zhu, Qihua ;

Zhou, Shouhuan .

APPLIED SURFACE SCIENCE, 2010, 256 (22) :6649-6654

[9] 3D transient thermal modelling of laser microchannel fabrication in lime-soda glass [J].

Issa, A. ;

Brabazon, D. ;

Hashmi, M. S. J. .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 207 (1-3) :307-314

[10] Surface micromachining of UV transparent materials [J].

Kopitkovas, G ;

Lippert, T ;

David, C ;

Wokaun, A ;

Gobrecht, J .

THIN SOLID FILMS, 2004, 453 :31-35

← 1 2 3 →