共 8 条
Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma
被引:1
作者:

Yurov, V. Yu.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia RAS, Gen Phys Inst, Moscow 119991, Russia

Bushuev, E. V.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia RAS, Gen Phys Inst, Moscow 119991, Russia

Bolshakov, A. P.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
Harbin Inst Technol, Harbin 150001, Heilongjiang, Peoples R China RAS, Gen Phys Inst, Moscow 119991, Russia

Antonova, I. A.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia RAS, Gen Phys Inst, Moscow 119991, Russia

Ralchenko, V. G.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
Harbin Inst Technol, Harbin 150001, Heilongjiang, Peoples R China RAS, Gen Phys Inst, Moscow 119991, Russia

Konov, V. I.
论文数: 0 引用数: 0
h-index: 0
机构:
RAS, Gen Phys Inst, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia RAS, Gen Phys Inst, Moscow 119991, Russia
机构:
[1] RAS, Gen Phys Inst, Moscow 119991, Russia
[2] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
[3] Harbin Inst Technol, Harbin 150001, Heilongjiang, Peoples R China
来源:
10TH INTERNATIONAL WORKSHOP 2017 STRONG MICROWAVES AND TERAHERTZ WAVES: SOURCES AND APPLICATIONS
|
2017年
/
149卷
基金:
俄罗斯科学基金会;
关键词:
SINGLE-CRYSTAL DIAMOND;
TEMPERATURE;
DEPOSITION;
DENSITY;
D O I:
10.1051/epjconf/201714902013
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
引用
收藏
页数:2
相关论文
共 8 条
[1]
High-rate growth of single crystal diamond in microwave plasma in CH4/H2 and CH4/H2/Ar gas mixtures in presence of intensive soot formation
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Bolshakov, A. P.
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Ralchenko, V. G.
论文数: 0 引用数: 0
h-index: 0
机构:
AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Yurov, V. Y.
论文数: 0 引用数: 0
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Popovich, A. F.
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h-index: 0
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Inst Radio Engn & Elect RAS, Pl Vvedenskogo 1, Fryazino 141190, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Antonova, I. A.
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h-index: 0
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Khomich, A. A.
论文数: 0 引用数: 0
h-index: 0
机构:
AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Inst Radio Engn & Elect RAS, Pl Vvedenskogo 1, Fryazino 141190, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Ashkinazi, E. E.
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h-index: 0
机构:
AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow 115409, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Ryzhkov, S. G.
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Vlasov, A. V.
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia

Khomich, A. V.
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h-index: 0
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AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
Inst Radio Engn & Elect RAS, Pl Vvedenskogo 1, Fryazino 141190, Russia AM Prokhorov Gen Phys Inst RAS, Vavilov Str 38, Moscow 119991, Russia
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Yurov, V. Yu.
论文数: 0 引用数: 0
h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Bolshakov, A. P.
论文数: 0 引用数: 0
h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Ralchenko, V. G.
论文数: 0 引用数: 0
h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Khomich, A. A.
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h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Antonova, I. A.
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h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Ashkinazi, E. E.
论文数: 0 引用数: 0
h-index: 0
机构:
Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Shershulin, V. A.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Pashinin, V. P.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Konov, V. I.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Moscow, Russia
Harbin Inst Technol, Harbin, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
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Bushuev, E. V.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Yurov, V. Yu.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Bolshakov, A. P.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Ralchenko, V. G.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia
Harbin Inst Technol, 92 Xidazhi Str, Harbin 150001, Peoples R China Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Ashkinazi, E. E.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Ryabova, A. V.
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Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia
Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

Antonova, I. A.
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Natl Res Nucl Univ MEPhI, Kashirskoe Shosse 31, Moscow 115409, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

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Russian Acad Sci, Inst Phys Microstruct, Acad Skaya Str 7, Afonino 603950, Nizhny Novgorod, Russia Russian Acad Sci, AM Prokhorov Gen Phys Inst, Vavilov Str 38, Moscow 119991, Russia

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Gicquel, A
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Univ Paris 13, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France Univ Paris 13, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France

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Mohasseb, F
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Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France

Hassouni, K
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Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France

Gicquel, A
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Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France Univ Paris 13, CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France
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Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia Univ Bristol, Sch Chem, Bristol BS8 1TS, Avon, England