Spacer engineering for performance enhancement of junctionless accumulation-mode bulk FinFETs

被引:21
作者
Biswas, Kalyan [1 ]
Sarkar, Angsuman [2 ]
Sarkar, Chandan Kumar [3 ]
机构
[1] MCKV Inst Engn, ECE Dept, Liluah, WB, India
[2] Kalyani Govt Engn Coll, ECE Dept, Kalyani, W Bengal, India
[3] Jadavpur Univ, ETCE Dept, Nano Device Simulat Lab, Kolkata, WB, India
关键词
MOSFET; permittivity; high-k dielectric thin films; junctionless accumulation-mode bulk FinFET; JAM bulk FinFET; spacer engineering; performance enhancement; electrical parameters; gate spacer lengths; gate spacer materials; downscaling effects; high k-value; on-off current ratio; maximum oscillation frequency; cut-off frequency; transconductance generation factor; transconductance computing; radiofrequency performance; analogue performance; dielectric constants; HIGH-K SPACER; ANALOG/RF PERFORMANCE; DEVICE PERFORMANCE; GATE; MOSFETS; IMPACT; GEOMETRY; LEAKAGE;
D O I
10.1049/iet-cds.2016.0151
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study investigates the performance of the junctionless accumulation-mode (JAM) bulk FinFETs. Different electrical parameters are simulated and analysed for the device with different gate spacer's lengths and materials. Spacers having dielectric constants between 1 and 22 are used to compare the device performance, whereas different spacer lengths are considered in order to understand the effect of spacer engineering. Importance is given to investigate the analogue and radio frequency (RF) performances by computing transconductance (g(m)), transconductance generation factor (g(m)/I-d), cut-off frequency (f(T)), maximum frequency of oscillation (f(max)) and so on. The device under study shows better ON-OFF current ratio, transconductance, transconductance generation factor using gate spacer having high k-value. However, because of increased gate capacitances, its RF performance degrades with increase in dielectric constant of the spacer used. The effects of downscaling of channel length (L) on analogue performance of the proposed junctionless accumulation mode device have also been presented. It has been observed that the analogue/RF performance of the device can be improved by reducing the spacer length.
引用
收藏
页码:80 / 88
页数:9
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