Ellipsometry

被引：0
|
作者：
Tadokoro, Toshiyasu [1 ]
机构：
[1] Techno Synergy Inc, Tokyo 1930832, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2006年 / 51卷 / 06期
关键词：
ellipsometry; polarization; refractive index; in-situ monitoring; total reflection; dynamics; shearing;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：450 / 455
页数：6
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