Manufacturing microstructured tool inserts for the production of polymeric microfluidic devices

被引：31

作者：

Zhang, Nan ^{[1
]}

Srivastava, Amit ^{[1
]}

Kirwan, Brendan ^{[1
]}

Byrne, Richard ^{[1
]}

Fang, Fengzhou ^{[2
]}

Browne, David J. ^{[1
]}

Gilchrist, Michael D. ^{[1
]}

机构：

[1] Univ Coll Dublin, Sch Mech & Mat Engn, Dublin 4, Ireland

[2] Tianjin Univ, Ctr MicroNano Mfg Technol, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2015年 / 25卷 / 09期

关键词：

bulk metallic glass (BMG); nickel insert; stainless steel tooling; BULK METALLIC-GLASS; PITTING CORROSION; MECHANICAL-BEHAVIOR; REPLICATION; MICRO; MOLD; NI; DEFORMATION; MICROSYSTEM; SILICON;

D O I：

10.1088/0960-1317/25/9/095005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tooling is critical in defining multi-scale patterns for mass production of polymeric microfluidic devices using the microinjection molding process. In the present work, fabrication of various microstructured tool inserts using stainless steel, nickel and bulk metallic glasses (BMGs) is discussed based on die-sinking EDM (electrical discharge machining), electroforming, focused ion beam milling and thermoplastic forming processes. Tool performance is evaluated in terms of surface roughness, hardness and tool life. Compared to stainless steel, nickel and BMGs are capable of integrating length scales from 10(0) to 10(-8) m and are good candidates for producing polymeric microfluidics. Selection of tool materials and manufacturing technologies should consider the end-user requirements of actual applications.

引用

页数：20

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