Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching

被引：19

作者：

Khuat, Vanthanh ^{[1
,2
,3
]}

Chen, Tao ^{[1
,2
]}

Gao, Bo ^{[1
,2
]}

Si, Jinhai ^{[1
,2
]}

Ma, Yuncan ^{[1
,2
]}

Hou, Xun ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Sch Elect & Informat Engn, Xian 710049, Peoples R China

[3] Quy Don Tech Univ, Hanoi 7EN 248, Vietnam

来源：

APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 24期

基金：

中国国家自然科学基金;

关键词：

NANOSTRUCTURES; MECHANISM; MEMS;

D O I：

10.1063/1.4883880

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Uniform nano-ripples were observed on the sidewall of micro-holes in silicon carbide fabricated by 800-nm femtosecond laser and chemical selective etching. The morphology of the ripple was analyzed using scanning electronic microscopy. The formation mechanism of the micro-holes was attributed to the chemical reaction of the laser affected zone with mixed solution of hydrofluoric acid and nitric acid. The formation of nano-ripples on the sidewall of the holes could be attributed to the standing wave generated in z direction due to the interference between the incident wave and the reflected wave. (C) 2014 AIP Publishing LLC.

引用

页数：5

共 36 条

[1] Formation mechanism of nanostructures in soda-lime glass using femtosecond laser [J].

Ahsan, Md Shamim ;

Kim, Yeong Gyu ;

Lee, Man Seop .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2011, 357 (03) :851-857

[2] Optically produced arrays of planar nanostructures inside fused silica [J].

Bhardwaj, VR ;

Simova, E ;

Rajeev, PP ;

Hnatovsky, C ;

Taylor, RS ;

Rayner, DM ;

Corkum, PB .

PHYSICAL REVIEW LETTERS, 2006, 96 (05)

[3] Spatiotemporal dynamics of femtosecond filament induced plasma channel in fused silica [J].

Blonskyi, I. ;

Brodyn, M. ;

Kadan, V. ;

Shpotyuk, O. ;

Dmitruk, I. ;

Pavlov, I. .

APPLIED PHYSICS B-LASERS AND OPTICS, 2009, 97 (04) :829-834

[4] Femtosecond filamentation in transparent media [J].

Couairon, A. ;

Mysyrowicz, A. .

PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2007, 441 (2-4) :47-189

[5] Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon [J].

Dong, Y ;

Molian, P .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (06) :839-846

[6] Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C-SiC by the femtosecond pulsed laser [J].

Dong, YY ;

Molian, P .

APPLIED PHYSICS LETTERS, 2004, 84 (01) :10-12

[7] Femtosecond pulsed laser micromachining of single crystalline 3C-SiC structures based on a laser-induced defect-activation process [J].

Dong, YY ;

Zorman, C ;

Molian, P .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :680-685

[8] Efficient femtosecond laser micromachining of bulk 3C-SiC [J].

Farsari, M ;

Filippidis, G ;

Zoppel, S ;

Reider, GA ;

Fotakis, C .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (09) :1786-1789

[9] Femtosecond laser micromachining in transparent materials [J].

Gattass, Rafael R. ;

Mazur, Eric .

NATURE PHOTONICS, 2008, 2 (04) :219-225

[10] Integration of plasmonic trapping in a microfluidic environment [J].

Huang, Lina ;

Maerkl, Sebastian J. ;

Martin, Olivier J. F. .

OPTICS EXPRESS, 2009, 17 (08) :6018-6024

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