A fully integrated multisite pressure sensor for wireless arterial flow characterization

被引:38
作者
DeHennis, Andrew D. [1 ]
Wise, Kensall D. [1 ]
机构
[1] Univ Michigan, Engn Res Ctr Wireless Integrated Microsyst, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
基金
美国国家科学基金会;
关键词
implantable sensor; monolithic integration; on-chip antenna; pressure sensor; wireless telemetry;
D O I
10.1109/JMEMS.2006.876668
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a fully integrated battery-free sensing system that uses a two-site wireless pressure measurement for the detection of arterial stenosis. The remotely powered system uses a backscatter-modulated passive-telemetry interface and transmits sensor as well as reference information to an external system. The monolithic process used to realize the system integrates a 3 mu m BiCMOS circuit with silicon-on-glass absolute pressure sensors and an on-chip antenna. The wireless sensor interface consumes 340 mu W and uses capacitance-to-frequency conversion for readout of the vacuum-sealed pressure transducers. The integrated device has a 200 mu m profile and a volume of 2 mm(3). The system can sense a reduction in flow of 13%, corresponding to a differential pressure of 3 mmHg.
引用
收藏
页码:678 / 685
页数:8
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