Elliptical concave microlens arrays built in the photosensitive TiO2/ormosils hybrid films

被引：6
作者：
Zhang, Xuehua [1 ,2 ]
Que, Wenxiu [1 ]
Javed, Hafiz M. Asif [1 ]
Wei, Wei [2 ]
机构：
[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Int Ctr Dielect Res, Elect Mat Res Lab,Key Lab Minist Educ, Xian 710049, Shaanxi, Peoples R China
[2] Nanjing Univ Posts & Telecommun, Coll Opto Elect Engn, Nanjing 210023, Jiangsu, Peoples R China
来源：
OPTICS COMMUNICATIONS | 2014年 / 330卷
基金：
中国国家自然科学基金; 高等学校博士学科点专项科研基金;
关键词：
Photosensitive; Organic-inorganic hybrid; Concave; Elliptical micro-lens; Imprint; SOL-GEL GLASS; REFRACTIVE MICROLENS; OPTICAL-PROPERTIES; FABRICATION; LITHOGRAPHY;
D O I：
10.1016/j.optcom.2014.05.009
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Photosensitive TiO2/organically modified silane hybrid thin films were prepared by a low-temperature sol-gel spin-coating technique. Optical and structural properties of the hybrid films with different titanium contents were characterized by prism coupling technique, UV-visible spectroscopy, Fourier transform infrared spectroscopy, and thermal gravimetric analysis. Advantages for fabrication of elliptical concave micro-lens arrays (MLAs) based on the as-prepared hybrid films were demonstrated by combining polydimethylsiloxane soft mold with a UV-cured imprint technique. Results indicate that the as-prepared hybrid films have great applicability for the fabrication of photonic components, and the fabrication technique provides a simple and cost-effective way for the fabrication of the sol-gel elliptical concave MLAs. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：12 / 18
页数：7
相关论文
共 20 条
[1]   Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp [J].
Äyräs, P ;
Rantala, JT ;
Honkanen, S ;
Mendes, SB ;
Peyghambarian, N .
OPTICS COMMUNICATIONS, 1999, 162 (4-6) :215-218
[2]   High photosensitive sol-gel hybrid materials for direct photo-imprinting of micro-optics [J].
Bae, BS .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2004, 31 (1-3) :309-315
[3]   Deposition of micropatterned coating using an ink-jet technique [J].
Danzebrink, R ;
Aegerter, MA .
THIN SOLID FILMS, 1999, 351 (1-2) :115-118
[4]   Two-photon fluorescence excitation with a microlens fabricated on the fused silica chip by femtosecond laser micromachining [J].
He, Fei ;
Cheng, Ya ;
Qiao, Lingling ;
Wang, Chen ;
Xu, Zhizhan ;
Sugioka, Koji ;
Midorikawa, Katsumi ;
Wu, Ji .
APPLIED PHYSICS LETTERS, 2010, 96 (04)
[5]   Low-cost and efficient coupling technique using reflowed sol-gel microlens [J].
He, M ;
Yuan, XC ;
Ngo, NQ ;
Bu, J ;
Tao, SH .
OPTICS EXPRESS, 2003, 11 (14) :1621-1627
[6]   Semiellipsoid microlens fabrication method using the lift-off and alignment exposure processes [J].
Hung, Chien-Hsin ;
Hung, Shih-Yu ;
Shen, Ming-Ho ;
Yang, Hsiharng .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, 22 (10)
[7]   Preparation and optical properties of sol-gel derived photo-patternable organic-inorganic hybrid films for optical waveguide applications [J].
Jia, C. Y. ;
Que, Wenxiu ;
Hu, W. G. .
THIN SOLID FILMS, 2009, 518 (01) :290-294
[8]   Photo-imageable sol-gel hybrid materials for simple fabrication of micro-optical elements [J].
Kang, Dong Jun ;
Bae, Byeong-Soo .
ACCOUNTS OF CHEMICAL RESEARCH, 2007, 40 (09) :903-912
[9]   Photoetching of spherical microlenses on glasses using a femtosecond laser [J].
Liu, Hewei ;
Chen, Feng ;
Wang, Xianhua ;
Yang, Qing ;
Zhang, Dongshi ;
Si, Jinhai ;
Hou, Xun .
OPTICS COMMUNICATIONS, 2009, 282 (20) :4119-4123
[10]   Photoresist reflow method of microlens production Part I: Background and experiments [J].
O'Neill, FT ;
Sheridan, JT .
OPTIK, 2002, 113 (09) :391-404
12