Schottky-barrier photodiode using p-diamond epilayer grown on p+-diamond substrates

被引:11
|
作者
Imura, Masataka [1 ]
Liao, Meiyong [2 ]
Alvarez, Jose [3 ,4 ]
Koide, Yasuo [2 ]
机构
[1] Natl Inst Mat Sci, World Premier Int WPI Res Ctr, Int Ctr Mat Nanoarchitecton MANA, Tsukuba, Ibaraki 3050044, Japan
[2] Natl Inst Mat Sci, Sensor Mat Ctr, Tsukuba, Ibaraki 3050044, Japan
[3] Univ Paris 06, Ecole Super Elect, CNRS, Lab Genie Elect Paris,UMR 8507, F-91192 Gif Sur Yvette, France
[4] Univ Paris 11, F-91192 Gif Sur Yvette, France
关键词
Diamond; Schottky-barrier photodiode; Ib-type diamond substrate; p(+)-diamond substrate;
D O I
10.1016/j.diamond.2008.10.065
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to understand a substrate effect on photoresponse properties of diamond-based Schottky-barrier photodiode (SPD), we utilize a heavily boron-doped p(+)-diamond substrate for a thin epilayer growth and the SPD fabrication. Vertical- and planar-types SPD's show excellent rectifying property with ideality factor close to unity and on-resistance as small as 1 Omega.cm(2). Both the SPD's are operable in photovoltaic and reverse bias modes with a quantum efficiency of 2.2 +/- 0.5% and does not provide a photoconductivity gain and a persistent photocurrent before and after annealing at 500 degrees C for 120 min. By comparing the photoresponse properties of SPD's on the p(+)-diamond substrate with on a Ib-diamond substrate, we conclude that a homojunction between p-diamond epilayer and Ib-diamond substrate governs a photo-carriers generation and a transport process, which produces an excellent spectral response property of SPD on the Ib-diamond substrate. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:296 / 298
页数:3
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