Formation of polyimide thin films on silicon surface by ionic self-assembly multilayer technique.

被引:0
|
作者
Liu, YJ [1 ]
Claus, RO [1 ]
机构
[1] VIRGINIA POLYTECH INST & STATE UNIV,FIBER & ELECTROOPT RES CTR,BLACKSBURG,VA 24061
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1997年 / 214卷
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中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:308 / PHYS
页数:1
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