H content determination at the (100) surface of homoepitaxial diamond by Elastic Peak Electron Spectroscopy

被引：4

作者：

Filippi, M. ^{[1
]}

Calliari, L. ^{[1
]}

Verona, C. ^{[2
]}

Verona-Rinati, G. ^{[2
]}

机构：

[1] Fen Bruno Kessler, Ctr Mat & Microsistemi, Via Sommarive 18, I-38100 Trento, Italy

[2] Univ Roma Tor Vergata, Ist Nazl Fis Nucl, Dip Ingn Meccan, I-00133 Rome, Italy

来源：

SURFACE SCIENCE | 2009年 / 603卷 / 13期

关键词：

Electron-solid scattering; Reflection spectroscopy; Surface structure; Diamond; Hydrogen atom; POLYMERIC THIN-FILMS; HYDROGEN INCORPORATION; CARBON; SPECTRA; SOLIDS; STATES; DEPTH;

D O I：

10.1016/j.susc.2009.04.004

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Elastic Peak Electron Spectroscopy (EPES) is used to characterize the H termination of the (1 0 0) diamond surface. Two specific features of the technique make this possible, namely surface sensitivity and the ability to directly detect H. An approach to quantify the H content for the particular spatial distribution involved here is discussed and a measure of H surface coverage is given. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：2082 / 2086

页数：5

共 29 条

[1] Fabrication of diamond single-hole transistors using AFM anodization process [J].

Banno, T ;

Tachiki, M ;

Seo, H ;

Umezawa, H ;

Kawarada, H .

[2] Surface cleaning, electronic states and electron affinity of diamond (100), (111) and (110) surfaces [J].

Baumann, PK ;

Nemanich, RJ .

SURFACE SCIENCE, 1998, 409 (02) :320-335

[3] On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films [J].

Filippi, M. ;

Calliari, L. .

SURFACE AND INTERFACE ANALYSIS, 2008, 40 (11) :1469-1474

[4] Dimer reconstruction and electronic surface states on clean and hydrogenated diamond (100) surfaces [J].

Furthmuller, J ;

Hafner, J ;

Kresse, G .

PHYSICAL REVIEW B, 1996, 53 (11) :7334-7351

[5] Information depth for elastic-peak electron spectroscopy [J].

Jablonski, A ;

Powell, CJ .

SURFACE SCIENCE, 2004, 551 (1-2) :106-124

[6]

JABLONSKI A, 2002, NIST ELECT ELASTIC S

[7] Hydrogen depth-profiling in chemical-vapor-deposited diamond films by high-resolution elastic recoil detection [J].

Kimura, K ;

Nakajima, K ;

Yamanaka, S ;

Hasegawa, M ;

Okushi, H .

APPLIED PHYSICS LETTERS, 2001, 78 (12) :1679-1681

[8] Origin of surface conductivity in diamond [J].

Maier, F ;

Riedel, M ;

Mantel, B ;

Ristein, J ;

Ley, L .

PHYSICAL REVIEW LETTERS, 2000, 85 (16) :3472-3475

[9] Hydrogen incorporation in diamond films [J].

Michaelson, Sh. ;

Lifshitz, Y. ;

Ternyak, O. ;

Akhvlediani, R. ;

Hoffman, A. .

[10] Hydrogen and surface excitation in electron spectra of polyethylene [J].

Orosz, GT ;

Gergely, G ;

Menyhard, M ;

Tóth, J ;

Varga, D ;

Lesiak, B ;

Jablonski, A .

SURFACE SCIENCE, 2004, 566 :544-548

← 1 2 3 →