共 50 条
- [32] Optimizing high efficient plasma immersion ion implantation hydrogenation for poly-Si thin film transistors NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 124 (01): : 69 - 75
- [33] Ion Implantation for Poly-Si Passivated Back-Junction Back-Contacted Solar Cells IEEE JOURNAL OF PHOTOVOLTAICS, 2015, 5 (02): : 507 - 514
- [36] Copper ion implantation and laser annealing of silica NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 191 : 468 - 472
- [37] Pulsed laser annealing of ion implanted insulators 13TH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2005, 5830 : 31 - 39
- [38] Self-aligned offset gate poly-Si TFTs using photoresist trimming technology Science China Information Sciences, 2015, 58 : 1 - 6