Laser-Plasma Chemistry

被引：0
作者：
Red'kin, S. V. [1 ,2 ]
机构：
[1] Russian Acad Sci, Mokerov Inst Ultrahigh Frequency Semicond Elect, Moscow, Russia
[2] MIREA Russian Technol Univ, Moscow, Russia
来源：
NANOBIOTECHNOLOGY REPORTS | 2022年 / 17卷 / SUPPL 1期
关键词：
laser; plasma-chemical etching; polycrystalline diamond; single-crystal sapphire; plate; crystal;
D O I：
10.1134/S2635167622070163
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Most currently existing laser methods for separating plates into crystals are analyzed. A technique for eliminating overheating of the substrate, its melting, modification, and release of material to the surface is proposed: local laser-plasma-chemical etching using the example of polycrystalline diamond and single-crystal sapphire. The operating pressure range is 6 x 10(-4)-1 x 10(-1) Torr.
引用
收藏
页码：S61 / S67
页数：7
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