Compact integration of GaN-based photonic chip with microfluidics system

被引:3
作者
An, Xiaoshuai [1 ]
Chen, Liang [1 ]
Li, Jing [1 ]
Li, Kwai Hei [1 ,2 ]
机构
[1] Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[2] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Com, Minist Educ, Shenzhen 518055, Peoples R China
基金
中国国家自然科学基金;
关键词
ON-A-CHIP; STOKES SHIFT; WAVE-GUIDES; ABSORBENCY; FLUORESCENCE; TECHNOLOGIES; DEVICES;
D O I
10.1364/OL.413215
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This Letter reports a demonstration of integrating a tiny GaN-based photonic chip with a PDMS microfluidics system. The photonic chip containing InGaN/GaN quantum wells is responsible for light emission and photodetection and fabricated through standard microfabrication techniques. The PDMS-enclosed chip is formed adjacent to the fluidic channel and operates in reflection mode, enabling the optical signals coupled into and out of the fluidic channel without the aid of external optics. The luminescence and photo-detecting properties are thoroughly characterized, confirming that the chip is capable of tracking the continuously flowing microdroplets with the changes of absorbance, length, and flow rate. The novel, to the best of our knowledge, photonic integration presented in this Letter is a significant step forward in the development of compact, miniature, and self-contained on-chip sensing systems, which are of great value in portable lab-on-a-chip applications. (C) 2021 Optical Society of America
引用
收藏
页码:170 / 173
页数:4
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