Simulating nuclear events in a TCAD model of a high-density SEU hardened SRAM technology

The interaction between a heavy ion and the overlayer materials in an integrated circuit may result in a nuclear reaction. This reaction leads to a charge generation profile that is substantially altered from the profile generated during a direct ionization event. In this work, nuclear reactions are integrated into the modeling of the SEU response of an SRAM cell using GEANT4-based simulations. The simulated transient response is compared to the response obtained using a typical heavy ion model that includes only direct ionization.