Gas sensing properties and p-type response of ALD TiO2 coated carbon nanotubes

被引：36

作者：

Marichy, Catherine ^{[1
]}

Donato, Nicola ^{[2
]}

Latino, Mariangela ^{[2
]}

Willinger, Marc Georg ^{[3
]}

Tessonnier, Jean-Philippe ^{[4
]}

Neri, Giovanni ^{[2
]}

Pinna, Nicola ^{[5
]}

机构：

[1] Univ Aveiro, CICECO, Dept Chem, P-3810193 Aveiro, Portugal

[2] Univ Messina, Dept Elect Engn Chem & Ind Engn, I-98166 Messina, Italy

[3] Max Planck Gesell, Fritz Haber Inst, Dept Inorgan Chem, D-14195 Berlin, Germany

[4] Iowa State Univ, Dept Chem & Biol Engn, Biorenewables Res Lab, Ames, IA 50011 USA

[5] Humboldt Univ, Inst Chem, D-12489 Berlin, Germany

来源：

NANOTECHNOLOGY | 2015年 / 26卷 / 02期

关键词：

atomic layer deposition; carbon nanotube; titanium dioxide; gas sensing; heterostructures; ATOMIC LAYER DEPOSITION; METAL-OXIDE; THIN-FILMS; SENSORS; NANOWIRE; ROUTES;

D O I：

10.1088/0957-4484/26/2/024004

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Amorphous titanium dioxide-coated carbon nanotubes (CNTs) were prepared by atomic layer deposition (ALD) and investigated as sensing layers for resistive NO2 and O-2 gas sensors. By varying ALD process conditions and CNT structure, heterostructures with different metal oxide grain size, morphology and coating thickness were synthesized. Higher responses were observed with homogeneous and continuous 5.5 nm thick films onto CNTs at an operating temperature of 150 degrees C, while CNTs decorated with either discontinuous film or TiO2 nanoparticles showed a weak response close to the one of device made of bare CNTs. An unexpected p-type behavior in presence of the target gas was also noticed, independently of the metal oxide morphology and thickness. Based on previous works, hypotheses were made in order to explain the p-type behavior of TiO2/CNT sensors.

引用

页数：7

共 58 条

[1] Gas Sensors Based on One Dimensional Nanostructured Metal-Oxides: A Review [J].

Arafat, M. M. ;

Dinan, B. ;

Akbar, Sheikh A. ;

Haseeb, A. S. M. A. .

SENSORS, 2012, 12 (06) :7207-7258

[2] Surface science studies of gas sensing materials:: SnO2 [J].

Batzill, Matthias .

SENSORS, 2006, 6 (10) :1345-1366

[3] WO3 films modified with functionalised multi-wall carbon nanotubes:: Morphological, compositional and gas response studies [J].

Bittencourt, C ;

Felten, A ;

Espinosa, EH ;

Ionescu, R ;

Llobet, E ;

Corteig, X ;

Pireaux, JJ .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 115 (01) :33-41

[4] Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates [J].

Deng, Shaoren ;

Verbruggen, Sammy W. ;

He, Zhanbing ;

Cott, Daire J. ;

Vereecken, Philippe M. ;

Martens, Johan A. ;

Bals, Sara ;

Lenaerts, Silvia ;

Detavernier, Christophe .

RSC ADVANCES, 2014, 4 (23) :11648-11653

[5]

Donato N, 2011, CARB BAS LOW DIM MAT, P37

[6] Hybrid metal oxide and multiwall carbon nanotube films for low temperature gas sensing [J].

Espinosa, E. H. ;

Ionescu, R. ;

Chambon, B. ;

Bedis, G. ;

Sotter, E. ;

Bittencourt, C. ;

Felten, A. ;

Pireaux, J. J. ;

Correig, X. ;

Llobet, E. .

SENSORS AND ACTUATORS B-CHEMICAL, 2007, 127 (01) :137-142

[7] Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring [J].

Fine, George F. ;

Cavanagh, Leon M. ;

Afonja, Ayo ;

Binions, Russell .

SENSORS, 2010, 10 (06) :5469-5502

[8] Oxygen-Sensing Properties of Electrospun CNTs/PVAc/TiO2 Composites [J].

Frontera, P. ;

Trocino, S. ;

Donato, A. ;

Antonucci, P. L. ;

Lo Faro, M. ;

Squadrito, G. ;

Neri, G. .

ELECTRONIC MATERIALS LETTERS, 2014, 10 (01) :305-313

[9] TiO2 Nanotubes: Recent Advances in Synthesis and Gas Sensing Properties [J].

Galstyan, Vardan ;

Comini, Elisabetta ;

Faglia, Guido ;

Sberveglieri, Giorgio .

SENSORS, 2013, 13 (11) :14813-14838

[10] Atomic Layer Deposition: An Overview [J].

George, Steven M. .

CHEMICAL REVIEWS, 2010, 110 (01) :111-131

← 1 2 3 4 5 6 →