Microstructures and Magnetic Properties of FePt Thin Films on TiON Intermediate Layer

The microstructures and magnetic properties of FePt(-SiOx-C) thin films grown on TiON and TiON/TiN intermediate layers were studied. TiON possessed smaller surface energy and smaller lattice constant than TiN. With increasing TiOx doping concentration, FePt grain shape changed from semi-spherical to square and grain size was significantly reduced. Meanwhile, good perpendicular magnetic anisotropy was retained, indicating that TiON intermediate layer could achieve a good balance between island growth and epitaxial growth. Furthermore, using TiON/TiN combined intermediate layer, FePt grain size was further reduced and the opening-up of in-plane M-H loop diminished. With 45 vol.% SiOx-25 vol.% C doping, well-isolated FePt grains with an average size as small as 5.7 nm and the grain size distribution of 0.9 nm were achieved. It also exhibited good perpendicular magnetic anisotropy with an out-of-plane coercivity of 18 kOe.