Design and simulation of electro-thermal compliant MEMS logic gates

PurposeThe purpose of this paper is to design an out-of-plane micro electro-thermal-compliant actuator based logic gates which work analogously to complementary metal oxide semiconductor (CMOS) based logic gates. The proposed logic gates used a single-bit mechanical micro ETC actuator per logic instead of using 6-14 individual transistors as in CMOS. Design/methodology/approachA complete analytical modelling is performed on a single ETC vertical actuator, and a relation between the applied voltage and the out-of-plane deflection is derived. Its coupled electro-thermo-mechanical analysis is carried out using micro electro mechanical system (MEMS) CAD tool CoventorWare to illustrate its performance. FindingsThis paper reports analytical and numerical simulation of basic MEMS ETC actuator-based logic gates. The proposed logic gate operates on 5 V, which suits well with conventional CMOS logic, which in turn reduces the power consumption of the device. Originality/valueThe proposed logic gates uses a single-bit MEMS ETC actuator per logic instead of using more transistors as in CMOS. The unique feature of this proposed logic gates is that the basic mechanical ETC actuator is customized in its structure to function as specific logic gates depending upon the given inputs.