Self-trapping of negative ions due to electron detachment in the afterglow of electronegative gas plasmas

被引：17

作者：

Kaganovich, ID ^{[1
]}

Ramamurthi, BN ^{[1
]}

Economou, DJ ^{[1
]}

机构：

[1] Univ Houston, Dept Chem Engn, Plasma Proc Lab, Houston, TX 77204 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 20期

关键词：

D O I：

10.1063/1.126492

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spatiotemporal evolution of charged species densities and wall fluxes during the afterglow of an electronegative discharge has been investigated. It was found that plasma decay crucially depends on the product of negative-ion-detachment frequency (gamma(d)) and diffusion time tau(d). If gamma(d)tau(d)> 2, negative ions convert to electrons during their diffusion towards the walls. The presence of detached electrons results in "self-trapping" of the negative ions, due to emerging electric fields, and the negative-ion flux to the walls is extremely small. Thus, negative ions can be extracted in the afterglow only if gamma(d)tau(d)< 2. (C) 2000 American Institute of Physics. [S0003-6951(00)00320-X].

引用

页码：2844 / 2846

页数：3

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