[1] Fudan Univ, Shanghai Ultraprecis Opt Mfg Engn Ctr, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China
[2] Fudan Univ, Inst Modern Phys, Dept Nucl Sci & Technol, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China
[3] Fudan Univ, Dept Phys, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
[4] Fudan Univ, Collaborat Innovat Ctr Adv Microstruct, Shanghai 200433, Peoples R China