Fundamental aspects in machining of metals with short and ultrashort laser pulses

被引:129
作者
Breitling, D [1 ]
Ruf, A [1 ]
Dausinger, F [1 ]
机构
[1] Univ Stuttgart, Inst Strahlwerkzeuge, D-70569 Stuttgart, Germany
来源
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III | 2004年 / 5339卷
关键词
laser micro-machining; ablation; drilling; laser-material interaction;
D O I
10.1117/12.541434
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
On the fast growing market of precision micro-machining of metals lasers do not only compete with other methods of structuring. There is also strong competition among different laser-processing strategies and, especially, among laser sources with different pulse duration. A comprehensive study of laser micro-machining with nanosecond, picosecond, and femtosecond laser pulses will be presented with a focus on fundamental aspects of the processes and on their practical consequences. An analysis will be given of the potential or the limitations of these laser processes with respect to their industrial application.
引用
收藏
页码:49 / 63
页数:15
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